Facility Monitoring System (FMS)

Model: FMS Cleanroom Integrated Environment

Monitoring System. When implementing real-time monitoring of cleanroom particles, FMS (Facility Monitoring Software) is used. The FMS supplied by TSI complies with Cleanroom GMP Validation CSV 21CFR Part 11 Compliant and enables real-time monitoring of all factors (temperature/humidity, differential pressure, floating bacteria, flow rate, alarm beacon, etc.) other than particles. FMS does not force the use of hardware such as a server system of a specific manufacturer, so users can freely select and use hardware of the desired specifications. In addition, by applying OPC UA Server/Client and connecting to an upper BMS that OPC can connect to, integrated monitoring of the production plant can also be easily implemented.